Surface micromachining and the intimately associated electrostatic actuation are two basic key technologies that have convinced a large number of researchers to push microsystems development ahead, ...

The fabrication and micromachining technologies that are used to produce ... Typically, these companies use MEMS processing equipment such as silicon etching tools, wafer grinders, lapping and ...

This technology is firmly based on a unique manufacturing paradigm, micromachining. Micromachining is a core technology that enables the MEMS and related new approaches in engineering and science.