Directed self-assembly (DSA) is a nanofabrication technique in which self-assembling block copolymer thin films (BCP) are ordered using larger-scale, pre-defined guides patterned by standard ...
“While block copolymer (BCP) lithography is theoretically capable of printing features smaller than 10 nm, developing practical BCPs for this purpose remains challenging. Herein, we report the ...
A recently developed block copolymer could help push the limits of integration and miniaturization in semiconductor manufacturing, report scientists. Chemically tailored for reliable directed ...
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