A parametric study reveals more sustainable etch dynamics, chromium mask selectivity, and pathways toward zero-global-warming ...

As a member of the MBene family, 2D MoB MBene has attracted much attention due to its fascinating properties, and is expected to be widely used in electrochemistry, energy storage, and catalysis ...

Etching is a method employed during the fabrication of semiconductors to chemically remove layers from the surface of the wafer substrate. Etching is a crucial process, and each wafer is subject to ...